UW Bothell Microfabrication Cleanroom (MFC) has been established in order to support faculty research and student education in 2015. It is a class 10000 cleanroom and is located at the 2nd floor in the Discovery Hall. The cleanroom includes modern microfabrication equipment that can be used to fabricate not only CMOS circuits, but also many electronic devices such as sensors and actuators. MFC plans to constantly update equipment to ensure that the facility stays up to date with advanced microfabrication process capabilities. MFC is a multidisciplinary research facility whose capabilities significantly impact on basic sciences (chemistry, biology, and physics) and engineering programs (EE and ME) at UW Bothell. Research endeavors at the MFC focus heavily on collaboration. We will reach out within the School of STEM, with departments across campus, and with regional academic and industry entities. Our facility provides resources that bring together the multidisciplinary researchers and students at the UW Bothell in order to accelerate the pace of engineering/science advancement, innovation, and excellence in education.
Research and Curriculum Support
UW Bothell MFC strongly supports faculty research and grant proposals. This will be achieved through the state-of-the-art cleanroom equipment access, process consultation, student training, research seminars, and so on.
UW Bothell MFC also provides students/faculty with experiment opportunity that can complement lectures in order to enhance learning process in engineering/science course. For example, B EE 546 CMOS II and B EE 551 Introduction to MEMS courses were developed and offered for graduate students in MSEE program in which students fabricated and characterized CMOS logic gates and sensors. The facility also plans to bring local K-12 students, teachers, and parents to introduce various research activities currently being conducted at the UW Bothell campus.
UW Bothell Microfabrication Cleanroom Facility
Discovery Hall 262, Box 358538, 425-352-5038
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